LIGO Document G1300838-v1

Calibration of Nanoindentation Data

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The ultimate goal of this project is to measure the mechanical properties of various optical coating materials. At the California Institute of Technology, these calculations are done using nanoindentation data; at Embry-Riddle Aeronautical University, these calculations are done using acoustic measurements. In order to extract the mechanical properties from the nanoindentation data using the analysis of Oliver and Pharr, it is imperative that the machine compliance and indenter area function are accurately known. These quantities are calibrated by implementing an iterative procedure that calculates machine compliance and indenter area function alternatively and applies them to the data until both quantities converge to their true values. The calibration is performed on fused quartz because its material properties are well known. Results of the calibration procedure are discussed. It is recommended that the calibration be used in future analysis of nanoindentation data, and that those results obtained be compared with results obtained by the Embry-Riddle acoustics group when available.
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