Room temperature mechanical loss of high stress silicon nitride film measured by cantilever ring-down method on double-side coated cantilever
- Document #:
- LIGO-G1501068-v2
- Document type:
- G - Presentations (eg Graphics)
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- Abstract:
- We report results of the loss angle measurement for high stress PECVD silicon nitride films.
- Files in Document:
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- LVC meeting SiN 20150831.pdf (1.4 MB)
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