Optical Dark Field Microscopy with First Contact

Document #:

LIGO-T0900186-v1

Document type:

T - Technical notes

Abstract:

Evaluates whether there are enough defects to focus on after cleaning a surface with First Contact. It is hard to focus after FC cleaning. Conclude that before we buy an automated-autofocus microscope for defect binning, we send both known samples (all the same) and FC supply to the scope vendors to make sure the system will still work.

Files in Document:

• T0900186-v1 (1st First Contact Optical Microscopy (4-1...pdf (149.2 kB)

Topics:

• Core Optics
• Reports
• Other data analysis
• Fabrication

Authors:

• Rand Dannenberg

Keywords:

First Contact Microscopy