LIGO Document D1300275-v4

Aligo, 4" Silicon Wafer Vertical (and Horizontal) Stand Assembly

Document #:
LIGO-D1300275-v4
Document type:
D - Drawings
Other Versions:
Abstract:
Aligo, 4" Silicon Wafer Stand Assembly, for mounting wafers vertically in chamber.

WAFER STAND ASSEMBLY CAN ALSO BE USED HORIZONTALLY BY SIMPLY REMOVING THE BASE. REFER TO
LIGO-T1300014: Aligo, BSC Flooring + HAM ISI, Witness Sample Placement Guidelines

This wafer holder is the default wafer holder for both horizontal and vertical placement. FOr horizontal placement one can also use this alt design see D1300026. CiT.

Files in Document:
Other Files:
Notes and Changes:
Updated with captured hardware + hinge joint for ease of assembly
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