Aligo, 4" Silicon Wafer Vertical (and Horizontal) Stand Assembly

Document #:

LIGO-D1300275-v4

Document type:

D - Drawings

Abstract:

Aligo, 4" Silicon Wafer Stand Assembly, for mounting wafers vertically in chamber.

WAFER STAND ASSEMBLY CAN ALSO BE USED HORIZONTALLY BY SIMPLY REMOVING THE BASE. REFER TO
LIGO-T1300014: Aligo, BSC Flooring + HAM ISI, Witness Sample Placement Guidelines

This wafer holder is the default wafer holder for both horizontal and vertical placement. FOr horizontal placement one can also use this alt design see D1300026. CiT.

Files in Document:

• D1300275-v4.PDF (243.4 kB)

Other Files:

• vertical_waferholder_notes-1.pdf (648.7 kB)
• vertical_waferholder_notes.docx (2.3 MB)

ICS/JIRA Record:

• d1300275

Topics:

• Installation
• Fabrication

Authors:

• Eduardo Sanchez

Keywords:

wafer contamination vertical

Notes and Changes:

Updated with captured hardware + hinge joint for ease of assembly

Related Documents:

• LIGO-D1300273: Aligo, 4" Silicon Wafer Stand, Housing
• LIGO-D1300274: Aligo, 4" Silicon Wafer Stand, Base

Referenced by:

• LIGO-T1300014-v5: Aligo, BSC Flooring + HAM ISI, Witness Sample Placement Requirements
• LIGO-E1201096-v5: Contamination Sample Handling - How to receive, use, send, buy and store samples.
• LIGO-E1400027: aLIGO, Particulate Contamination Tools of the trade