LIGO Document D1300275-v4
- Aligo, 4" Silicon Wafer Stand Assembly, for mounting wafers vertically in chamber.
WAFER STAND ASSEMBLY CAN ALSO BE USED HORIZONTALLY BY SIMPLY REMOVING THE BASE. REFER TO
LIGO-T1300014: Aligo, BSC Flooring + HAM ISI, Witness Sample Placement Guidelines
This wafer holder is the default wafer holder for both horizontal and vertical placement. FOr horizontal placement one can also use this alt design see D1300026. CiT.
- Updated with captured hardware + hinge joint for ease of assembly
DCC Version 3.4.0, contact
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