Aligo, BSC Flooring + HAM ISI, Witness Sample Placement Requirements

Document #:

LIGO-T1300014-v4

Document type:

T - Technical notes

Abstract:

Aligo, BSC Flooring + HAM ISI, Witness Sample Placement Requirements. See the Vertical Wafer Holder Notes for guidance on getting the wafers in and out of the vertical holders.

Files in Document:

• T1300014-v4.pdf (4.5 MB)

Other Files:

• 1 inch pet-g container spec.pdf (686.9 kB)
• vertical_waferholder_notes.pdf (2.3 MB)

Topics:

• System Engineering
• Integration
• Installation

Authors:

• Eduardo Sanchez

Notes and Changes:

Updated to add 4" wafers mt. options at 3pm and 9pm locations on ETM/ITM.

Related Documents:

• LIGO-D1300275: Aligo, 4" Silicon Wafer Vertical (and Horizontal) Stand Assembly
• LIGO-E1201096: Contamination Sample Handling - How to receive, use, send, buy and store samples.
• LIGO-E1201035: aLIGO Chamber Entry & Exit Procedures
• LIGO-D1300512: aLIGO, SYS, 1" DIA WITNESS OPTIC MOUNT ASSEMBLY